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Dense arrays of uniform submicron pores in silicon and their applications
Version 2 2024-06-06, 00:40
Version 1 2022-01-27, 08:22
journal contribution
posted on 2024-06-06, 00:40 authored by D Brodoceanu, Roey ElnathanRoey Elnathan, B Prieto-Simón, B Delalat, T Guinan, E Kroner, NH Voelcker, T KrausDense arrays of uniform submicron pores in silicon and their applications
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Journal
ACS Applied Materials and InterfacesVolume
7Pagination
1160-1169Location
United StatesPublisher DOI
ISSN
1944-8244eISSN
1944-8252Language
EnglishPublication classification
C1 Refereed article in a scholarly journalIssue
2Publisher
AMER CHEMICAL SOCUsage metrics
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Science & TechnologyTechnologyNanoscience & NanotechnologyMaterials Science, MultidisciplinaryScience & Technology - Other TopicsMaterials Scienceporous siliconSALDI substratesantireflective surfacescolloidal lithographymetal-assisted chemical etchingpolymer fiber arraysPOROUS SILICONHOLE ARRAYFABRICATIONSURFACELITHOGRAPHYDEPOSITIONETHANOLLAYERS
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