Dense arrays of uniform submicron pores in silicon and their applications

Brodoceanu, D; Elnathan, Roey; Prieto-Simón, B; Delalat, B; Guinan, T; Kroner, E; Voelcker, N H; Kraus, T

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Dense arrays of uniform submicron pores in silicon and their applications

journal contribution

posted on 2015-01-01, 00:00 authored by D Brodoceanu, Roey ElnathanRoey Elnathan, B Prieto-Simón, B Delalat, T Guinan, E Kroner, N H Voelcker, T Kraus

Dense arrays of uniform submicron pores in silicon and their applications

History

Journal

ACS Applied Materials and Interfaces

Volume

7

Issue

2

Pagination

1160 - 1169

Publisher

AMER CHEMICAL SOC

Location

United States

Publisher DOI

https://doi.org/10.1021/am506891d

ISSN

1944-8244

eISSN

1944-8252

Language

English

Author URL

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000348332700016&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a045e4b2bb1f2b747c68c720ec8913b7

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C1 Refereed article in a scholarly journal

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Keywords

Science & Technology Technology Nanoscience & Nanotechnology Materials Science, Multidisciplinary Science & Technology - Other Topics Materials Science porous silicon SALDI substrates antireflective surfaces colloidal lithography metal-assisted chemical etching polymer fiber arrays HOLE ARRAY FABRICATION SURFACE LITHOGRAPHY DEPOSITION ETHANOL LAYERS

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Dense arrays of uniform submicron pores in silicon and their applications

History

Journal

Volume

Issue

Pagination

Publisher

Location

Publisher DOI

ISSN

eISSN

Language

Author URL

Publication classification

Usage metrics

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Keywords

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