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Dense arrays of uniform submicron pores in silicon and their applications
journal contribution
posted on 2015-01-01, 00:00 authored by D Brodoceanu, Roey ElnathanRoey Elnathan, B Prieto-Simón, B Delalat, T Guinan, E Kroner, N H Voelcker, T KrausDense arrays of uniform submicron pores in silicon and their applications
History
Journal
ACS Applied Materials and InterfacesVolume
7Issue
2Pagination
1160 - 1169Publisher
AMER CHEMICAL SOCLocation
United StatesPublisher DOI
ISSN
1944-8244eISSN
1944-8252Language
EnglishPublication classification
C1 Refereed article in a scholarly journalUsage metrics
Categories
Keywords
Science & TechnologyTechnologyNanoscience & NanotechnologyMaterials Science, MultidisciplinaryScience & Technology - Other TopicsMaterials Scienceporous siliconSALDI substratesantireflective surfacescolloidal lithographymetal-assisted chemical etchingpolymer fiber arraysHOLE ARRAYFABRICATIONSURFACELITHOGRAPHYDEPOSITIONETHANOLLAYERS