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Determination of the erosion rate in the transient region of an ultralow energy secondary ion mass spectrometry profile using medium energy ion scattering

Version 2 2024-06-18, 23:04
Version 1 2020-09-18, 14:15
journal contribution
posted on 2024-06-18, 23:04 authored by CF McConville, SH Al-Harthi, MG Dowsett, FS Gard, TJ Ormsby, B Guzman, TCQ Noakes, P Bailey
Determination of the erosion rate in the transient region of an ultralow energy secondary ion mass spectrometry profile using medium energy ion scattering

History

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volume

20

Pagination

1690-1698

Location

SANTA FE, NM

Publisher DOI

ISSN

1071-1023

Language

English

Author URL

Publication classification

C1.1 Refereed article in a scholarly journal

Issue

4

Publisher

A V S AMER INST PHYSICS

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    Research Publications

    Categories

    Keywords

    Science & TechnologyTechnologyPhysical SciencesEngineering, Electrical & ElectronicNanoscience & NanotechnologyPhysics, AppliedEngineeringScience & Technology - Other TopicsPhysicsOXYGENBOMBARDMENTOXIDATIONSILICON

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    All Rights Reserved

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