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Effect of Vacuum System Base Pressure On Corrosion Resistance of Sputtered Al Thin Films

journal contribution
posted on 2025-03-19, 23:01 authored by Gerald Frankel, Xiaobo Chen, Rajeev Gupta, Sasikaran Kandasamy, Nick BirbilisNick Birbilis
Effect of Vacuum System Base Pressure On Corrosion Resistance of Sputtered Al Thin Films

History

Journal

ECS Meeting Abstracts

Volume

MA2013-02

Pagination

1-1

Location

Pennington, N.J.

ISSN

2151-2043

eISSN

2151-2043

Language

eng

Issue

21

Publisher

The Electrochemical Society

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