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Effect of vacuum system base pressure on corrosion resistance of sputtered Al thin films

Version 2 2024-06-02, 23:51
Version 1 2023-11-03, 04:54
journal contribution
posted on 2024-06-02, 23:51 authored by GS Frankel, XB Chen, RK Gupta, S Kandasamy, Nick BirbilisNick Birbilis
Effect of vacuum system base pressure on corrosion resistance of sputtered Al thin films

History

Journal

Journal of the Electrochemical Society

Volume

161

Pagination

C195-C200

ISSN

0013-4651

eISSN

1945-7111

Language

English

Publication classification

C1.1 Refereed article in a scholarly journal

Issue

4

Publisher

ELECTROCHEMICAL SOC INC