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Electron beam directed etching of hexagonal boron nitride

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journal contribution
posted on 2024-06-05, 07:04 authored by C Elbadawi, TT Tran, M Kolíbal, T Šikola, J Scott, Q Cai, LH Li, T Taniguchi, K Watanabe, M Toth, I Aharonovich, C Lobo

High resolution directed electron beam etching of hBN using water as the precursor gas.

History

Journal

Nanoscale

Volume

8

Pagination

16182-16186

Location

England

Publisher DOI

Open access

  • Yes

ISSN

2040-3364

eISSN

2040-3372

Language

English

Publication classification

C1 Refereed article in a scholarly journal

Copyright notice

2016, The Royal Society of Chemistry

Issue

36

Publisher

ROYAL SOC CHEMISTRY

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    Keywords

    Science & TechnologyPhysical SciencesTechnologyChemistry, MultidisciplinaryNanoscience & NanotechnologyMaterials Science, MultidisciplinaryPhysics, AppliedChemistryScience & Technology - Other TopicsMaterials SciencePhysicsTRIANGULAR HOLEPOLARITONSNANOSHEETSCRYSTALSInstitute for Frontier Materials099999 Engineering not elsewhere classified4099 Other engineering4016 Materials engineering4018 Nanotechnology

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    All Rights Reserved

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