Electron beam directed etching of hexagonal boron nitride
Version 2 2024-06-05, 07:04
Version 1 2016-09-28, 00:00
journal contribution
posted on 2024-06-05, 07:04 authored by C Elbadawi, TT Tran, M Kolíbal, T Šikola, J Scott, Q Cai, LH Li, T Taniguchi, K Watanabe, M Toth, I Aharonovich, C Lobo<p>High resolution directed electron beam etching of hBN using water as the precursor gas.</p>
History
Related Materials
- 1.
Location
EnglandOpen access
- Yes
Language
EnglishPublication classification
C1 Refereed article in a scholarly journalCopyright notice
2016, The Royal Society of ChemistryJournal
NanoscaleVolume
8Pagination
16182-16186ISSN
2040-3364eISSN
2040-3372Issue
36Publisher
ROYAL SOC CHEMISTRYUsage metrics
Categories
No categories selectedKeywords
Science & TechnologyPhysical SciencesTechnologyChemistry, MultidisciplinaryNanoscience & NanotechnologyMaterials Science, MultidisciplinaryPhysics, AppliedChemistryScience & Technology - Other TopicsMaterials SciencePhysicsTRIANGULAR HOLEPOLARITONSNANOSHEETSCRYSTALSInstitute for Frontier Materials099999 Engineering not elsewhere classified4099 Other engineering4016 Materials engineering4018 Nanotechnology
Licence
Exports
RefWorks
BibTeX
Ref. manager
Endnote
DataCite
NLM
DC