Experimental studies and modelling of the deformation behaviour of multiple nanolayers

Microcompression tests were performed on monolithic Cu and Fe thin films and a Cu/Fe multilayer that had each individual layer of 200 nm thick, to understand the mechanical behaviour of multiple nanolayers. The micron-sized pillars were prepared by focused-ion beam (FIB) technique and compressed with a flat punch in a nanoindenter. The flow curves of the monolithic Cu and Fe thin films and Cu/Fe multilayer were extracted from the microcompression tests. The monolithic Cu thin film bulges in the top region of the pillar, while the Fe thin film cracks due to its columnar grain structure. For the Cu/Fe multilayer, the ductile Cu layers accommodate the majority of plastic deformation upon compression, while cracking in the Fe layers leads to the failure of the multilayer. Finite element models of microcompression tests were also developed to provide insights into the deformation behaviours of the multilayer and monolithic thin films. © 2012 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.