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Fabrication of nanoscale Ti honeycombs by focused ion beam

journal contribution
posted on 2003-01-01, 00:00 authored by H Hosokawa, K Shimojima, Y Chino, Y Yamada, Cui'E Wen, M Mabuchi
Ti honeycombs with the side of 800 and 400 nm were fabricated by focused ion beam (FIB), though the surfaces of the bottom and wall of the Ti honeycombs were rough, as compared with the surfaces of the bottom and wall of the Si honeycomb. It is demonstrated that the nanoscale Ti components can be fabricated in a short time by FIB.

History

Journal

Materials science and engineering A

Volume

344

Issue

1-2

Pagination

365 - 367

Publisher

Elsevier S. A.

Location

Lausanne, Switzerland

ISSN

0921-5093

eISSN

1873-4936

Language

eng

Publication classification

C1.1 Refereed article in a scholarly journal

Copyright notice

2002, Elsevier Science B. V.

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