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Fabrication of silicon nanowire arrays by near-field laser ablation and metal-assisted chemical etching

Version 2 2024-06-06, 00:40
Version 1 2022-01-27, 08:26
journal contribution
posted on 2024-06-06, 00:40 authored by D Brodoceanu, HZ Alhmoud, Roey ElnathanRoey Elnathan, B Delalat, NH Voelcker, T Kraus
Fabrication of silicon nanowire arrays by near-field laser ablation and metal-assisted chemical etching

History

Journal

Nanotechnology

Volume

27

Article number

075301

Pagination

1-8

Location

Bristol, Eng.

ISSN

0957-4484

eISSN

1361-6528

Language

eng

Publication classification

C1 Refereed article in a scholarly journal

Issue

7

Publisher

IOP Publishing

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