Deakin University
Browse

High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever

Version 2 2024-06-19, 04:44
Version 1 2023-01-31, 02:54
journal contribution
posted on 2024-06-19, 04:44 authored by QX Huang, HJ You, D Yuan, Y Zhao, XJ Hu
High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever

History

Journal

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volume

22

Pagination

656-663

Publisher DOI

ISSN

1004-924X

Language

en

Publication classification

C1.1 Refereed article in a scholarly journal

Issue

3

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Usage metrics

    Research Publications

    Categories

    No categories selected

    Keywords

    Uncategorised value

    Licence

    All Rights Reserved

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC