High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever

https://hdl.handle.net/10536/DRO/DU:30154531
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posted on 2024-06-19, 04:44 authored by QX Huang, HJ You, D Yuan, Y Zhao, XJ Hu

High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever

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DOI - Is version of https://doi.org/10.3788/OPE.20142203.0656

Language

en

Publication classification

C1.1 Refereed article in a scholarly journal

Journal

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volume

22

Pagination

656-663

ISSN

1004-924X

Issue

3

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

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