Version 2 2024-06-13, 09:05Version 2 2024-06-13, 09:05
Version 1 2015-08-24, 15:53Version 1 2015-08-24, 15:53
journal contribution
posted on 2024-06-13, 09:05authored bySP Wilhelm, RW Kay, MI Mohammed, Y Lacrotte, MPY Desmulliez
This article describes a LTCC embossing technique performed during the isostatic lamination process. The technique allows for the reduction of manufacturing steps by patterning simultaneously the top and bottom faces of a green ceramic tape using structured metal sheets. The experiments detail the manufacture of raised and recessed patterns on the self constrained HL2000 ceramic system, including bump arrays, raised wall structures and recessed channels.
History
Journal
Microsystem technologies
Volume
19
Pagination
801-807
Location
Berlin, Germany
ISSN
0946-7076
Language
eng
Publication classification
C Journal article, C1.1 Refereed article in a scholarly journal