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Nanoscale coating on tip geometry by cryogenic focused ion beam deposition
journal contribution
posted on 2021-10-01, 00:00 authored by S Zhang, G Gervinskas, Y Liu, Ross MarceauRoss Marceau, J FuNanoscale coating on tip geometry by cryogenic focused ion beam deposition
History
Journal
Applied Surface ScienceVolume
564Article number
ARTN 150355Pagination
1 - 7Location
Amsterdam, The NetherlandsPublisher DOI
ISSN
0169-4332eISSN
1873-5584Language
EnglishPublication classification
C1 Refereed article in a scholarly journalPublisher
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No categories selectedKeywords
Science & TechnologyPhysical SciencesTechnologyChemistry, PhysicalMaterials Science, Coatings & FilmsPhysics, AppliedPhysics, Condensed MatterChemistryMaterials SciencePhysicsCryogenic depositionTip geometryFocused ion beamCryo-FIBAtom probe tomographyGLANCING ANGLE DEPOSITIONELECTRON-BEAMTHIN-FILMSFABRICATIONCONDUCTIVITYTOMOGRAPHYAustralian Research Council (DP180103955)Australian Research Council grant (FEI Quanta 3D FIB - ARC Funding (LE0882821))100712 Nanoscale Characterisation4018 Nanotechnology4016 Materials engineering
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