Physical Vapor Deposition Cluster Arrival Energy Enhances the Electrochemical Performance of Silicon Thin-Film Anodes for Li-Ion Batteries

Salah, M; Pathirana, T; Alvarez De Eulate, E; Hall, C; Stoehr, B; Rudd, S; Kerr, Robert; Fabretto, M

Physical Vapor Deposition Cluster Arrival Energy Enhances the Electrochemical Performance of Silicon Thin-Film Anodes for Li-Ion Batteries

https://hdl.handle.net/10536/DRO/DU:30159491
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posted on 2021-01-01, 00:00 authored by M Salah, T Pathirana, E Alvarez De Eulate, C Hall, B Stoehr, S Rudd, Robert KerrRobert Kerr, M Fabretto

Physical Vapor Deposition Cluster Arrival Energy Enhances the Electrochemical Performance of Silicon Thin-Film Anodes for Li-Ion Batteries

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DOI - Is version of https://doi.org/10.1021/acsaem.1c02035

Location

Washington, D.C.

Language

eng

Publication classification

C1 Refereed article in a scholarly journal

Journal

ACS Applied Energy Materials

Volume

4

Pagination

12243-12256

ISSN

2574-0962

eISSN

2574-0962

Issue

11

Publisher

American Chemical Society (ACS)

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Keywords

silicon anodes PVD sputtering deposition power film stress electrochemical and cyclability performance lithium diffusion coefficient

Physical Vapor Deposition Cluster Arrival Energy Enhances the Electrochemical Performance of Silicon Thin-Film Anodes for Li-Ion Batteries

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