Polarity-dependent forming in ion bombarded amorphous silicon memory devices

Polarity-dependent forming in ion bombarded metal-semiconductor-metal (MSM) memory devices of hydrogenated amorphous silicon is reported. It is shown that prior to ion bombardment, current transport in the MSM devices is asymmetric and is controlled by the Schottky barriers at two MS junctions. Upon bombardment, however, there is a bulk component to the current and the I-V characteristics of the devices become symmetric at low bias voltages. The forming voltage in the bombarded devices shows polarity dependence. For positive bias applied on the top contact, we find that devices form at the same electric field independent of the thickness of the amorphous silicon while for negative voltage on the top contact, the electric field needed for forming increases with the thickness. A model involving the difference in energy deposition and heat sinking for the two polarities is proposed.