Polyethylene terephthalate (PET) bulk film analysis using C60+, Au3+, and Au+ primary ion beams

The damage characteristics of polyethylene terephthalate (PET) have been studied under bombardment by C₆₀+, Au₃+ and Au+ primary ions. The observed damage cross-sections for the three ion beams are not dramatically different. The secondary ion yields however were significantly enhanced by the polyatomic primary ions where the secondary ion yield of the [M + H]+ is on average 5× higher for C₆₀+ than Au₃+ and 8× higher for Au₃+ than Au+. Damage accumulates under Au+ and Au₃+ bombardment while C₆₀+ bombardment shows a lack of damage accumulation throughout the depth profile of the PET thick film up to an ion dose of 1 ~ 10¹⁵ ions cm⁻². These properties of C₆₀+ bombardment suggest that the primary ion will be a useful molecular depth profiling tool.