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Reducing the macroparticle content of cathodic arc evaporated TiN coatings

journal contribution
posted on 2004-05-24, 00:00 authored by S Harris, E Doyle, Y C Wong, P Munroe, J Cairney, John LongJohn Long
Cathodic arc evaporation (CAE) is a widely used technique for generating highly ionised plasma from which hard, wear-resistant PVD coatings can be deposited. A major drawback of this technique is the emission of micrometer-sized droplets of cathode material from the arc spot, which are commonly referred to as ‘macroparticles’. In this study, the effect of cathode poisoning was investigated as a method to reduce the number of macroparticles in PVD coatings. While the study focuses on the reduction of macroparticles in titanium nitride coatings, the outcomes and key findings can be broadly applied to the cathodic arc process, in particular, for the reduction of macroparticles in more advanced CAE coatings. The results support earlier findings that have shown that poisoning of the cathode can reduce the number of macroparticles emitted from the arc spot. The results of glow discharge optical emission spectroscopy (GD-OES) showed that the titanium content of the coatings varied little between the respective coatings despite changes in the deposition pressure from 0.1 to 1.2 Pa. The GD-OES results also showed the presence of oxide contamination at the surface of the coatings, which was significantly reduced with increasing deposition pressure. The coatings were also deposited onto high-speed steel twist drills to compare the metal-cutting performance when dry drilling a workpiece of cast iron. The results of the drill tests showed that tool life increased with a reduction in the number of macroparticles.

History

Journal

Surface and coatings technology

Volume

183

Issue

2-3

Pagination

283 - 294

Publisher

Elsevier Science BV

Location

Amsterdam, Netherlands

ISSN

0257-8972

Language

eng

Publication classification

C1 Refereed article in a scholarly journal; C Journal article

Copyright notice

2003, Elsevier B.V.