Deakin University
Browse

File(s) under permanent embargo

Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys

journal contribution
posted on 2013-01-01, 00:00 authored by Y Mafinejad, Abbas KouzaniAbbas Kouzani, K Mafinezhad
Radio frequency micro electro mechanical systems (RF MEMS) have enabled a new generation of devices that bring many advantages due to their very high performances. There are many incentives for the integration of the RF MEMS switches and electronic devices on the same chip. However, the high actuation voltage of RF MEMS switches compared to electronic devices poses a major problem. By reducing the actuation voltage of the RF MEMS switch, it is possible to integrate it into current electronic devices. Lowering the actuation voltage will have an impact on RF parameters of the RF MEMS switches. This investigation focuses on recent progress in reducing the actuation voltage with an emphasis on a modular approach that gives acceptable design parameters. A number of rules that should be considered in design and fabrication of low actuation RF MEMS switches are suggested.

History

Journal

Journal of microelectronics, electric components and materials

Volume

43

Issue

2

Pagination

85 - 96

Publisher

Strokovno Drustvo za Mikroelektroniko, Elektronske Sestavne Dele in Materiale (MIDEM)

Location

Ljubljana, Slovenia

ISSN

0352-9045

Language

eng

Publication classification

C1 Refereed article in a scholarly journal

Copyright notice

2013, MIDEM