File(s) under permanent embargo
Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys
journal contribution
posted on 2013-01-01, 00:00 authored by Y Mafinejad, Abbas KouzaniAbbas Kouzani, K MafinezhadRadio frequency micro electro mechanical systems (RF MEMS) have enabled a new generation of devices that bring many advantages due to their very high performances. There are many incentives for the integration of the RF MEMS switches and electronic devices on the same chip. However, the high actuation voltage of RF MEMS switches compared to electronic devices poses a major problem. By reducing the actuation voltage of the RF MEMS switch, it is possible to integrate it into current electronic devices. Lowering the actuation voltage will have an impact on RF parameters of the RF MEMS switches. This investigation focuses on recent progress in reducing the actuation voltage with an emphasis on a modular approach that gives acceptable design parameters. A number of rules that should be considered in design and fabrication of low actuation RF MEMS switches are suggested.
History
Journal
Journal of microelectronics, electric components and materialsVolume
43Issue
2Pagination
85 - 96Publisher
Strokovno Drustvo za Mikroelektroniko, Elektronske Sestavne Dele in Materiale (MIDEM)Location
Ljubljana, SloveniaISSN
0352-9045Language
engPublication classification
C1 Refereed article in a scholarly journalCopyright notice
2013, MIDEMUsage metrics
Categories
No categories selectedKeywords
Licence
Exports
RefWorks
BibTeX
Ref. manager
Endnote
DataCite
NLM
DC