Silk fibroin as a water-soluble bio-resist and its thermal properties
Version 2 2024-06-05, 02:18Version 2 2024-06-05, 02:18
Version 1 2016-06-07, 14:52Version 1 2016-06-07, 14:52
journal contribution
posted on 2024-06-05, 02:18authored byJ Morikawa, M Ryu, K Maximova, A Balčytis, G Seniutinas, L Fan, V Mizeikis, Jingliang LiJingliang Li, X Wang, M Zamengo, S Juodkazis
E-beam exposure unzips beta-sheets in crystalline domains of silk fibroin and makes it water-soluble, enabling its usage as an aqueous-based electron beam lithography resist.