Space–Time Coupled Finite Element Simulation of PECVD Reactor

journal contribution

posted on 2025-10-14, 03:38 authored by Z Dehghanifard, AR Ahmadi, AR Ganjovi, MA Bolorizadeh

Space–Time Coupled Finite Element Simulation of PECVD Reactor

History

Related Materials

1.
DOI - Is version of https://doi.org/10.1007/s40819-015-0061-7

Open access

No

Language

eng

Journal

International Journal of Applied and Computational Mathematics

Volume

2

Pagination

303-313

ISSN

2349-5103

eISSN

2199-5796

Issue

3

Publisher

Springer Nature

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Licence

All Rights Reserved

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