Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation
journal contribution
posted on 2009-01-01, 00:00 authored by Z Zhang, W Liu, Z T Song, Xiaokai HuSynthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation
History
Journal
ECS transactionsVolume
18Issue
1Pagination
559 - 564Publisher
Electrochemical SocietyLocation
Pennington, N.J.Publisher DOI
ISSN
1938-5862eISSN
1938-6737Language
engNotes
ATTENTION ERA 2015 CLUSTER LEADERS: The Library does not currently have access to the research output associated with this record, please contact DRO staff for further information regarding access.drosupport@deakin.edu.auPaper presented at the ISTC/CSTIC 2009 (CISTC); Shanghai; China; 19 March 2009 through 20 March 2009Publication classification
C1.1 Refereed article in a scholarly journalUsage metrics
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