Time-of-flight medium energy ion scattering study of epitaxial Si/Si1-xGex superlattice structures
Version 2 2024-06-18, 23:06Version 2 2024-06-18, 23:06
Version 1 1996-01-01, 00:00Version 1 1996-01-01, 00:00
journal contribution
posted on 2024-06-18, 23:06 authored by CF McConville, TCQ Noakes, S Sugden, PK Hucknell, CJ SofieldTime-of-flight medium energy ion scattering study of epitaxial Si/Si1-xGex superlattice structures
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Location
ARIZONA STATE UNIV CAMPUS, TEMPE, AZLanguage
EnglishPublication classification
C1 Refereed article in a scholarly journalJournal
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsVolume
118Pagination
573-577ISSN
0168-583XIssue
1-4Publisher
ELSEVIER SCIENCE BVUsage metrics
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