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Time-of-flight medium energy ion scattering study of epitaxial Si/Si1-xGex superlattice structures

Version 2 2024-06-18, 23:06
Version 1 1996-01-01, 00:00
journal contribution
posted on 2024-06-18, 23:06 authored by CF McConville, TCQ Noakes, S Sugden, PK Hucknell, CJ Sofield
Time-of-flight medium energy ion scattering study of epitaxial Si/Si1-xGex superlattice structures

History

Related Materials

Location

ARIZONA STATE UNIV CAMPUS, TEMPE, AZ

Language

English

Publication classification

C1 Refereed article in a scholarly journal

Journal

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volume

118

Pagination

573-577

ISSN

0168-583X

Issue

1-4

Publisher

ELSEVIER SCIENCE BV