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X-ray diffraction line broadening from gold and platinum thin films
journal contribution
posted on 2001-01-01, 00:00 authored by Peter LynchPeter Lynch, R Cheary, E Dooryhee, N Armstrong, C TangX-ray diffraction line profile analysis has been used to study the microstructure of (Ill) oriented gold and platinum thin films deposited by thermal evaporation and DC magnetron sputtering. In addition to crystallite size broadening, the profiles from these films displayed broadening arising from dislocations. A parallel investigation, using transmission electron microscopy (TEM) was undertaken to study the nature of dislocations formed, and to provide information on the dimensions of the crystallite columns in the films. X-ray data were collected at room temperature to determine the anisotropy of the broadening with (hkl), using a Siemens D5000 powder diffractometer (CuKa radiation) and two high-resolution synchrotron instruments (BM 16 at the ESRF [A=0.35A] and station 2.3 at the Daresbury laboratory. Two approaches to instrument deconvolution were investigated; Fourier deconvolution and fundamental parameters profile fitting, using Lab6 as a reference material to determine the instrument profile function. After removal of the crystallite size broadening contribution from the measured integral breadths, the residual microstrain broadening was modelled assuming dislocations based on a FCC a/2<110>{ Ill} slip system. The results of the X-ray analysis agreed with dark field TEM micrographs, which showed that many of the crystallites contained dislocations of mixed character (screw- edge).
History
Journal
Materials science forumVolume
378-381Pagination
358 - 363Publisher
Trans Tech PublicationsLocation
Stafa-Zurich, SwitzerlandISSN
0255-5476Language
engNotes
This paper was presented at the 7th European Powder Diffraction Conference; Barcelona; Spain; 20 May 2000 through 23 May 2000Publication classification
C1.1 Refereed article in a scholarly journalCopyright notice
2001, Trans Tech PublicationsUsage metrics
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