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Development of a low actuation voltage electrostatic RF MEMS switch

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thesis
posted on 2015-04-01, 00:00 authored by Y Mafinejad
The research focused on the design, fabrication and measurement of a low actuation voltage micro electro mechanical high frequency switch. The fabricated micro switch offers outstanding radio frequency parameters for a very large frequency band, with actuation voltage and switching time less than 20 volts and 3 micro seconds, respectively.

History

Pagination

159 pages : illustrations, tables, graphs, some coloured

Open access

  • Yes

Material type

thesis

Resource type

thesis

Language

eng

Degree type

Research doctorate

Degree name

PhD (Engineering)

Copyright notice

The Author. All Rights Reserved.

Editor/Contributor(s)

A Kouzani, A Kaynak

Faculty

Faculty of Science

School

Engineering and Built Environment