File(s) under permanent embargo

Doped nanostructured semiconductors produced by cold plasma combined with heat

thesis

posted on 2016-08-01, 00:00 authored by D Rubin De Celis Leal

The potential of combining cold plasma and thermal treatment for the nanofabrication of advances semiconductors was investigated.

History

Pagination

viii, 87 pages : colour illustrations, graphs

Open access

Yes

Material type

thesis

Resource type

thesis

Language

eng

Degree type

Research doctorate

Degree name

PhD

Copyright notice

The Author. All Rights Reserved

Editor/Contributor(s)

J Dai

Faculty

Institute for Frontier Materials

Usage metrics

Categories

Keywords

nanofabrication semiconductors plasma reactive nitrogen species Microelectronics and Integrated Circuits Nanoelectronics Plasma Physics; Fusion Plasmas; Electrical Discharges

Licence

All Rights Reserved

Exports

RefWorks

BibTeX

Ref. manager

Endnote

DataCite

NLM

DC