This study explored plasma techniques to improve the efficiency of dye sensitised solar cells and perovskite solar cells. It was found that plasma functionalization of TiO2 improved dye absorption, thereby improving efficiency. Controllable nitrogen doping of TiO2 was achieved by a unique system that combines plasma with heat treatment. The doping reduced the band-gap of TiO2. A crystalline TiO2 thin film on plastic substrates was successfully achieved by a low temperature plasma method, which could potentially allow such soft and flexible substrates to be used for solar cells.