Corrosion properties of plasma-polymerized methylcyclohexane films using electrochemical methods

Nam, N. D., Kim, J. G., Park, S. M. and Lee, N. E. 2008, Corrosion properties of plasma-polymerized methylcyclohexane films using electrochemical methods, Metals and materials international, vol. 14, no. 2, pp. 197-201, doi: 10.3365/met.mat.2008.04.197.

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Title Corrosion properties of plasma-polymerized methylcyclohexane films using electrochemical methods
Author(s) Nam, N. D.
Kim, J. G.
Park, S. M.
Lee, N. E.
Journal name Metals and materials international
Volume number 14
Issue number 2
Start page 197
End page 201
Total pages 5
Publisher Daehan Geumsog Jae'lyo Haghoe
Place of publication Seoul, Korea
Publication date 2008-04
ISSN 1598-9623
Keyword(s) corrosion resistance
electrochemical impedance spectroscopy
Summary Three types of methylcyclohexane (MCH) coating were deposited as interlayer dielectrics on copper using plasma-enhanced chemical vapor deposition (PECVD) at three different RF plasma power levels. The coating performance was then evaluated by an electrochemical im pedance spectroscopy (EIS) and a potentiodynamic polarization test in 3.5 wt.% NaCl solution. An atomic force microscopy (AFM) and Fourier transform infrared reflection (FT-IR) spectroscopy were also conducted to analyze the coatings. The MCH coatings showed a lower corrosion rate than the copper substrate in the potentiodynamic tests. The EIS results showed that the corrosion resistance of the coatings increased with an increasing plasma power. Thus, the MCH films with an increasing plasma power improved the corrosion resistance due to the formation of a low-porosity coating, the enhanced formation of C−H, C−C, and C≡C stretching configurations, and the improved smooth surfaces.
Language eng
DOI 10.3365/met.mat.2008.04.197
Field of Research 099999 Engineering not elsewhere classified
Socio Economic Objective 970109 Expanding Knowledge in Engineering
HERDC Research category C1.1 Refereed article in a scholarly journal
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Document type: Journal Article
Collections: Institute for Frontier Materials
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