Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation Zhang, Zefang, Liu, Weili, Song, Zhi-Tang and Hu, Xiaokai 2009, Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation, ECS transactions, vol. 18, no. 1, pp. 559-564, doi: 10.1149/1.3096502. Attached Files Name Description MIMEType Size Downloads Title Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation Author(s) Zhang, Zefang Liu, Weili Song, Zhi-Tang Hu, Xiaokai Journal name ECS transactions Volume number 18 Issue number 1 Start page 559 End page 564 Total pages 6 Publisher Electrochemical Society Place of publication Pennington, N.J. Publication date 2009 ISSN 1938-5862 1938-6737 Notes ATTENTION ERA 2015 CLUSTER LEADERS: The Library does not currently have access to the research output associated with this record, please contact DRO staff for further information regarding access.drosupport@deakin.edu.au Paper presented at the ISTC/CSTIC 2009 (CISTC); Shanghai; China; 19 March 2009 through 20 March 2009 Language eng DOI 10.1149/1.3096502 Field of Research 039999 Chemical Sciences not elsewhere classified Socio Economic Objective 970103 Expanding Knowledge in the Chemical Sciences HERDC Research category C1.1 Refereed article in a scholarly journal Persistent URL http://hdl.handle.net/10536/DRO/DU:30052757 Document type: Journal Article Collection: Faculty of Science, Engineering and Built Environment Related Links Link Description Connect to published version (restricted access) Go to link with your DU access privileges     Unless expressly stated otherwise, the copyright for items in DRO is owned by the author, with all rights reserved. Versions Version Filter Type Fri, 31 May 2013, 15:38:51 EST Mon, 03 Jun 2013, 09:26:46 EST Fri, 13 Jun 2014, 17:26:41 EST Thu, 18 Sep 2014, 12:00:58 EST Filtered Full Citation counts:   Cited 0 times in TR Web of Science Cited 2 times in Scopus Search Google Scholar Access Statistics: 213 Abstract Views, 0 File Downloads  -  Detailed Statistics Created: Fri, 31 May 2013, 15:38:50 EST