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A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine

Alhmoud, H, Brodoceanu, D, Elnathan, Roey, Kraus, T and Voelcker, NH 2021, A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine, Progress in Materials Science, vol. 116, pp. 1-42, doi: 10.1016/j.pmatsci.2019.100636.

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Title A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine
Author(s) Alhmoud, H
Brodoceanu, D
Elnathan, Roey
Kraus, T
Voelcker, NH
Journal name Progress in Materials Science
Volume number 116
Article ID 100636
Start page 1
End page 42
Total pages 42
Publisher Elsevier
Place of publication Amsterdam, The Netherlands
Publication date 2021-02
ISSN 0079-6425
1873-2208
Keyword(s) Biosensors
DESORPTION/IONIZATION MASS-SPECTROMETRY
Drug delivery
EFFICIENT CAPTURE
FABRICATION
HIGH-ASPECT-RATIO
INTERFERENCE LITHOGRAPHY
MAMMALIAN-CELLS
Materials Science
Materials Science, Multidisciplinary
Metal-assisted chemical etching
METAL-FILMS
Nanostructured silicon
NANOWIRE ARRAYS
Porous silicon
Science & Technology
SI-NANOWIRES
SURFACE
Technology
Tissue engineering
Language eng
DOI 10.1016/j.pmatsci.2019.100636
Field of Research 030302 Nanochemistry and Supramolecular Chemistry
03 Chemical Sciences
09 Engineering
HERDC Research category C1 Refereed article in a scholarly journal
Persistent URL http://hdl.handle.net/10536/DRO/DU:30162003

Document type: Journal Article
Collections: Faculty of Health
School of Medicine
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Created: Thu, 27 Jan 2022, 07:22:09 EST

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